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In-situ Scanner Temp...

In-situ High Temp Sy...

Four-channel Tempera...

Cryogenic High-accur...

In-situ Scanner Temp System/ In-situ,Scanner,Temp,System

In-situ Scanner Temp System supports monitoring of dry, immersion and EUV lithography scanners. In-situ Scanner Temp System produces high accuracy temporal and spatial wafer temperature data that can assist lithography engineers monitor scanner thermal variations that affect pattern overlay performance. With a standard-thickness(12 inches) wafer format, this system can be used to monitor lithography thermal uniformity and stability with high precision and low noise, enabling scanner qualification and matching.

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In-situ High Temp System/ In-situ,High,Temp,System

In-situ High Temp System is designed to optimize and monitor advanced film processes (FEOL and BEOL ALD, CVD and PVD) and other elevated temperature processes. In-situ High Temp System wafer measures process tool thermal uniformity, providing a complete picture of temporal and spatial temperature data collected in real-time under actual production process conditions. By revealing thermal variations in applications such as plasma environments that can affect process windows andpatterning performance, the system helps IC manufacturers optimize the integration of new materials,transistor technologies and complex patterning techniques.

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Four-channel Temperature Detector FB604/ Four-channel,Temperature,Detector,FB604

Four-channel temperature detector FB604 is one of the main recommended products of our company's high-accuracy temperature detectors and controllers made in China. It highly integrates high-accuracy electrical measurement technology and deep industry needs, and comprehensively meets the calibration and verification of laboratory temperature sensors. It has many advantages such as high accuracy, fast measurement, and easy to use. FB604 can be used to measure platinum resistors and thermistors, and has a wide range of applications in operations, manufacturing, and scientific research in the fields of measurement, electric power, petrochemical, metallurgy, pharmaceuticals, biology, and automobile manufacturing, as an ideal choice for temperature verification and testing.

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Cryogenic High-accuracy Temperature Controller/ Cryogenic,High-accuracy,Temperature,Controller

The cryogenic high-accuracy temperature controller highly integrates technology of high-precision electrical measurement, precise temperature control , fully meeting the demand of high-precision temperature measurement and control. It has many advantages, such as high measurement accuracy, high temperature control accuracy, fast sampling speed, fast temperature control speed and convenient use, etc. The cryogenic high-accuracy temperature controller is mainly used to accurately monitor the series of low-temperature temperature sensors, including diodes and resistance temperature detector (RTD). It has four sensor inputs and four control outputs, and is programmed for closed-loop temperature control in proportional integral and differential (PID) mode. When the temperature range exceeds the available range of a given sensor, the regional adjustment function of the controller will automatically switch the input of the temperature sensor, thus, achieving seamless temperature control from 300 mK to over 670 K. Alarms, relays and analog voltage outputs can help to automate auxiliary control functions. This product is widely used in Cryogenic field, quantum computing, large-scale industrial production and other scientific research work, and it is an ideal choice for low temperature verification, testing and control.

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