Mask Wireless Temp System
Overview
Mask Wireless Temp System is used for qualification and monitoring of e-beam writers as extreme temperature stability is required over the extended time period (up to 24 hours) to completely write a mask.Mask Wireless Temp System collects temperature data for 24 consecutive hours, providing mask manufacturers with the data needed to ensure the thermal stability of the system prior to writing critical masks.
Features
a.Small size, high accuracy, high measurement speed;
b.Temperature accuracy up to 10mK;
c.Wireless communication, short response time.
Parameters
Temperature range | 20℃～50℃ |
Temperature accuracy | 10mK |
Accuracy of repeated measurement | ＜2mK |
Number of sensors | 30 |
Sampling frequency | max.4Hz |
Sensor response time | ≤1s |
Communication interface | WiFi |
Continuous working hours | ≥100min |
Applications | Lithography,Gluing,Pre-exposure bake, Post-exposure bake |
Warranty period | 1 year |
Delivering Growth – in Asia and Beyond.
Hu ICP Bei No. 2023002235
