Mask Wireless Temp System
Mask Wireless Temp System is used for qualification and monitoring of e-beam writers as extreme temperature stability is required over the extended time period (up to 24 hours) to completely write a mask.Mask Wireless Temp System collects temperature data for 24 consecutive hours, providing mask manufacturers with the data needed to ensure the thermal stability of the system prior to writing critical masks.
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Hu ICP Bei No. 2023002235
