Wafer-level high-temperature wireless wafer temperature measurement system
Wafer wireless temperature measurement systems are designed to optimize and monitor advanced thin film processes (FEOL and BEOLALD, CVD and PVD), RTP rapid annealing, and other high temperature processes.Wafer wireless temperature measurement systems measure the thermal uniformity of process equipment and provide temporal and spatial temperature data collected under real-world production process conditions.Wafer wireless temperature measurement systems provide in-situ, real-time temperature data to help IC manufacturers accurately debug process equipment to improve yields and productivity.
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Hu ICP Bei No. 2023002235
