Overview
Wafer wireless temperature measurement systems are designed to optimize and monitor advanced thin film processes (FEOL and BEOLALD, CVD and PVD), RTP rapid annealing, and other high temperature processes.Wafer wireless temperature measurement systems measure the thermal uniformity of process equipment and provide temporal and spatial temperature data collected under real-world production process conditions.Wafer wireless temperature measurement systems provide in-situ, real-time temperature data to help IC manufacturers accurately debug process equipment to improve yields and productivity.
Features
1.High accuracy, flexible application, fast measurement;
2.Scanning speed up to 4Hz, temperature accuracy up to 1mK;
3.Wireless communication.
Product size | Wafer diameter 300mm (12 inches) ±0.2mm, thickness ≤6mm
|
Power supply | Battery |
Temperature measurement range | 0℃~850℃ |
Temperature accuracy | ±0.2℃
|
Accuracy of repeated measurement | <0.1℃
|
Number of sensors | 21 |
Measurement Frequency | max.4Hz |
Sensor Response Time | ≤1s |
Communication interface | WiFi |
Continuous Working Time | 0℃~~850℃,7minutes 650℃,15minutes
|
Warranty Period | 1year |
Delivering Growth – in Asia and Beyond.