Wafer-level Wireless Temperature Measurement System
Wafer wireless temperature measurement system captures the influence of etching process and environment on wafer, provides direct and real-time temperature measurement during every critical step in chip manufacturing. Armed with this comprehensive temperature data, technology engineers will be able to characterize and fine-tune process conditions to improve technology and equipment performance, wafer quality and yield. Wafer wireless temperature measurement system is used to monitor temperature changes in the production process of cutting-edge products, breaking through the technical blockade.
更多
Hu ICP Bei No. 2023002235
