Micro Wireless Temperature Recorder - Semiconductor - Industry&Field

Semiconductor

Micro Wireless Temperature Recorder

The photolithography system is the core of chip manufacturing, and temperature detection is particularly important, because temperature will affect the flow of photoresist, thereby affecting the yield of photolithography. Micro wireless temperature recorder is small in size, light in weight, and easy to carry. It is suitable for temperature detection and recording of exposure systems, photolithography systems, etc.

Basic Introduction

Parameters

Micro Wireless Temperature Recorder

Overview

The lithography system is the core component of chip manufacturing, in which the temperature detection is particularly important, and the temperature will affect the flow of the photoresist, thus affecting the lithographyThe yield of the finished product. Micro wireless temperature recorder is small in size, light in weight and easy to carry. It is suitable for temperature detection of exposure system,lithography system recording and etc.

Features

a. Small-sized, flexible and universal;

b. Temperature accuracy less-than10mK

c. Wireless communication mode is adopted, with short response time and continuous working time of more than 10 days.

Parameters

Dimensions	Length 20mm ×width 20mm × thickness 10mm
Temperature Range	0℃ ～ 40℃
Temperature Accuracy	＜ 10mK
Accuracy Of Repeated Measurement	＜5mK
Sensor Response Time	≤1s
Sampling Frequency	max.1Hz
Continuous Working Hours	≥10 Days
Applications	Exposure system, Lithography system and etc.
Warranty Period	1 Year

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