2025-05-06 12:28:33
Technical Specification
Rapid cooling, automatic control, 1-channel temperature control, with accuracy better than 10mK.
Client
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences - Ultra-Broad Spectrum Light Source for Integrated Circuit Process Inspection Equipment.
Application
As advanced semiconductor processes become increasingly complex, the requirements for defect and precision inspection in integrated circuit manufacturing have grown more stringent. Semiconductor inspection equipment serves as core infrastructure in IC processes, with inspection light sources directly determining their performance and efficiency.
Hu ICP Bei No. 2023002235
