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  • Semiconductor Temperature Measurement System
    • Micro Wireless Temperature Recorder
    Micro Wireless Temperature Recorder
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    The lithography system is the core component of chip manufacturing, in which the temperature detection is particularly important, and the temperature will affect the flow of the photoresist, thus affecting the lithographyThe yield of the finished product. Micro wireless temperature recorder is small in size, light in weight and easy to carry. It is suitable for temperature detection of exposure system,lithography system recording and etc.
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    • Micro Wireless Temperature Recorder


    Overview 

    The lithography system is the core component of chip manufacturing, in which the temperature detection is particularly important, and the temperature will affect the flow of the photoresist, thus affecting the lithographyThe yield of the finished product. Micro wireless temperature recorder is small in size, light in weight and easy to carry. It is suitable for temperature detection of exposure system,lithography system recording and etc.



    Features 

    a.Small-sized, flexible and universal;  

    b.Temperature accuracy less-than10mK;  

    c.Wireless communication mode is adopted, with short response time and continuous working time of more than 10 days.


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