Micro Wireless Temperature Recorder
Overview
Lithography system is the core equipment for manufacturing chips, in which
temperature detection is particularly important. Temperature will affect the flow of photoresist, thus affecting the yield of lithography.
The microtype wireless temperature recorder is small in size, light in weight and convenient to carry. It is suitable for temperature detection and recording in exposure system and lithography
Features
a. Small-sized, flexible and universal;
b. Temperature accuracy ＜10mK;
c.Wireless communication mode is adopted, with short response time and continuous working time of more than 10 days.
Dimensions | Length 20mm * width 20mm * thickness 10mm |
Temperature range | 0℃～40℃ |
Temperature accuracy | ＜10mK（3σ） |
Accuracy of repeated measurement | ＜5mK（3σ） |
Sampling frequency | Max.1Hz |
Sensor response time | ≤1s |
communication interface | WiFi |
Continuous working hours | ≥10days |
Warranty period | 1 year |
Delivering Growth – in Asia and Beyond.
Hu ICP Bei No. 2023002235
